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Metal furnace |Ceramics-metal airtight bonding in a "high purity atmosphere"

Strongly sealed in a clean atmosphere while controlling the thermal expansion difference between ceramics and metals.

Our company handles the "Metal Furnace" for all-metal hot zones. In joining (sealing, brazing, diffusion bonding), trace amounts of O2/H2O/hydrocarbons are directly related to wettability, interfacial reactions, and airtightness. The metal furnace operates at a vacuum level of 10^-5 Pa and features a (Mo/W) hot zone, eliminating carbon and organic contamination sources. It can be applied to high-purity annealing/sealing of thin films, electrodes, and optical components. 【Features】 ■ Compatible with high vacuum (10^-5 Pa level) to reducing atmosphere operation ■ Maintains a clean atmosphere with a metal furnace structure (Mo/W) ■ Temperature uniformity within ±1°C and long-term stable control ■ Easy combination with metal jigs and load pressurization mechanisms ■ Supports miniaturization of samples and localized heating tests *For more detailed information, please download the materials or feel free to contact us.

  • Industrial Furnace
  • Metal furnace

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Metal furnace | Carbon-free "metal atmosphere"

Observe the original reactions of the materials as they are! In a chamber that uses no graphite components at all, suppress side reactions and contamination derived from carbon.

The "metal furnace" we handle aims to evaluate the surface reactions and phase changes of the materials themselves; however, challenges such as outgassing from graphite components and organic materials can disrupt the system. Processes sensitive to chemical atmospheres like halogen, nitriding, and reduction have higher reproducibility when carbon-free. Therefore, a metal furnace, unified with metal for the inner walls, heaters, and fixtures, is effective. We also have test machines available. Additionally, we have experience in manufacturing furnaces at mass production scale, not just small models. 【Features】 ■ Carbon-free - All-metal (Mo/W) hot zone/metal chamber, no use of graphite or organic materials to suppress side reactions derived from carbon. ■ Clean atmosphere switching - Smooth transition from vacuum to Ar/N2, with low blanking after replacement. ■ Reproducibility of reactions - Reproducing the same conditions in a small chamber with short cycles. *For more details, please feel free to contact us.

  • Industrial Furnace
  • Metal furnace

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Metal furnace for semiconductor packaging

Achieving airtight sealing of ceramics and metals in a high-purity atmosphere.

In the semiconductor industry, the airtightness in the sealing process is crucial for product reliability and long-term performance maintenance. Particularly for semiconductor devices that are susceptible to temperature changes and external environmental influences, a strong bond between the sealing material and metal/ceramic materials is required. Inadequate sealing can lead to device failure or performance degradation. A metal furnace achieves strong sealing while controlling the thermal expansion differences between ceramics and metals by providing a high vacuum and clean atmosphere. This contributes to the improvement of semiconductor device reliability. 【Application Scenarios】 - High-purity annealing of thin films, electrodes, and optical components - Sealing of ceramics and metals 【Benefits of Implementation】 - Stabilization of wettability, interfacial strength, and airtightness in a low O2/H2O/HC environment - Prevention of contamination and carbonization in a carbon-free environment - Reduction of prototype to mass production cycles through rapid switching between vacuum and reducing atmospheres

  • Industrial Furnace
  • Metal furnace

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Metal furnace for optics

Sealing ceramics and metals in a high-purity atmosphere.

In the optical industry, the precision and cleanliness of material bonding are crucial for the manufacturing of high-performance optical components. Particularly for optical parts that are susceptible to temperature changes and external environmental influences, the airtightness and durability of the joints between ceramics and metals significantly affect product performance. Improper bonding can lead to deterioration of optical properties and a reduction in product lifespan. Our metal furnace achieves strong sealing while controlling the thermal expansion differences between ceramics and metals under high vacuum and reducing atmosphere. 【Usage Scenarios】 - Sealing of high-precision optical elements - Annealing of thin-film optical components - Brazing of optical parts 【Benefits of Implementation】 - Improved cleanliness of joints due to high vacuum environment - Ensured stable airtightness - Long-term stabilization of optical properties

  • Industrial Furnace
  • Metal furnace

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